EAP HOST EMULATOR 使用指南

1. 應用程式概述

1.1 什麼是 EAP HOST EMULATOR

EAP HOST EMULATOR 是一款專為半導體製造業設計的 SECS/GEM (Semiconductor Equipment Communications Standard / Generic Equipment Model，半導體設備通訊標準/通用設備模型) 協定模擬器。本應用程式使用 HSMS (High-Speed Message Service，高速訊息服務) 協定進行連線與訊息交換，模擬主機設備 (Host) 與半導體製造設備之間的通訊。

1.2 主要功能特色

本應用程式提供以下核心功能:

詳細操作示範請參考:

2. 頁面功能介紹

2.1 Setting 設定頁面

設定頁面

設定頁面提供應用程式的核心設定功能,包含以下四大區塊:

2.1.1 Theme Setting 主題設定

2.1.2 Connection Setting 連線設定

本區塊用於設定 HSMS 協定的連線參數:

Protocol Selection 協定選擇

General Settings 一般設定

Timeout Settings 逾時設定

Operation Buttons 操作按鈕

連線成功後,應用程式右上角的狀態指示燈會從紅色 (Offline 離線) 變為綠色 (Online 線上)。

示範:

2.1.3 Secs Message Library Loader SECS 訊息庫載入器

示範:

2.1.4 Control State Setting 控制狀態設定

示範:

2.2 ManualOperation 手動操作頁面

手動操作頁面

手動操作頁面是 SECS 訊息的編輯與傳送中心,主要包含以下功能:

2.2.1 Secs Message List SECS 訊息清單

左側面板顯示已載入的 SECS 訊息清單:

Message Naming Format 訊息命名格式

Message Categories 訊息分類
從螢幕截圖可見支援多種 SECS 訊息類型:

Operations 操作功能

示範:

2.2.2 Selected Node Details 選取節點詳情

右側面板以階層式方式顯示選中訊息的完整樹狀結構,呈現 SECS 訊息的所有元素。

2.2.3 SML Editor SML 編輯器

本頁面整合了完整的 SECS 訊息編輯功能:

Supported Data Types 支援的資料型態

Editing Functions 編輯功能

Editing Workflow 編輯流程

  1. 建立根節點,命名格式為 SxFy[W]:描述
  2. 在根節點下新增 LIST 或資料型態節點
  3. 在 LIST 節點下可繼續新增巢狀結構
  4. 輸入各節點的值
  5. 雙擊傳送或儲存為檔案

Template Variable System 範本變數系統

SML 編輯器支援 ASCII 欄位的動態變數替換與型別轉換功能:

Variable Substitution Format 變數替換格式: {{屬性名稱}}

Supported Type Cast Names 支援的型別轉換名稱 (不區分大小寫):

示範:

2.3 WorkSpace 工作區頁面

工作區頁面

工作區頁面是半導體製程流程的核心管理介面,主要包含以下功能模組:

2.3.1 Information Card Area 資訊卡區域

上方區域顯示多個 Information Card (最多 4 個,對應 Port 1-4),每個卡片代表一個工作端口:

Card Information Display 卡片資訊顯示

Card Function Buttons 卡片功能按鈕

Job Operation Area 工作操作區
每個 Information Card 下方顯示兩個主要操作項目:

2.3.2 Slot Mapping Visual Window 槽位視覺化視窗

槽位視覺化視窗

Window Information 視窗資訊

Slot Status Display 槽位狀態顯示

Slot Details 槽位詳情
點擊任一槽位可在右側查看詳細資訊:

Application Scenarios 應用場景

2.3.3 Verify Flow 驗證流程

驗證流程是半導體製程中的關鍵步驟,用於確認載具與物料資訊的正確性:

Main Verification Items 主要驗證項目

  1. Carrier ID Verify 載具識別碼驗證
    • 驗證載具識別碼是否與系統記錄相符
    • Event ID: 262 (CarrierIDVerify)
  2. Slot Verify 槽位驗證
    • 驗證槽位配置是否正確
    • 檢查每個槽位的佔用狀態
    • Event ID: 301 (SlotVerify)

Verification Process 驗證流程

  1. 載具到達端口
  2. 系統讀取 Carrier ID
  3. 執行 Carrier ID 驗證
  4. 讀取 Slot Mapping
  5. 執行槽位驗證
  6. 驗證通過後更新 Information Card 資訊

Required SML Message Names 必要的 SML 訊息名稱
系統會在載入的 SML 檔案中搜尋特定的訊息名稱。訊息名稱必須符合以下格式 (不區分大小寫):

示範:

2.3.4 Job Flow 工作流程

Job Flow 管理半導體製程中的工作排程與執行:

Process Job 製程工作

Control Job 控制工作

Required SML Message Names 必要的 SML 訊息名稱
系統會在載入的 SML 檔案中搜尋特定的訊息名稱。訊息名稱必須符合以下格式 (不區分大小寫):

Process Job 相關訊息:

Control Job 相關訊息:

其他訊息:

示範:

2.3.5 Auto Flow 自動流程

Auto Flow 整合了驗證、工作建立與執行等完整製程步驟:

Automation Flow Steps 自動化流程步驟

  1. 載具到達觸發 Port State Change
  2. 自動執行 Carrier ID 與 Slot 驗證
  3. 根據參數自動建立 Process Job 與 Control Job
  4. 自動開始工作執行
  5. 完成後自動卸載並產生 Process Result

Flow Monitoring 流程監控

示範:

2.3.6 Result Viewer 結果檢視器

處理完成後,點擊 ProcessResult 可開啟 Process Result Detail 視窗,包含三個分頁:

Comparison Tab 比對分頁

比對分頁

從範例螢幕截圖可見:

Processed Tab 已處理分頁

已處理分頁

Expected Tab 預期分頁

預期分頁

Result Status Mapping 結果狀態對應

2.3.7 Material Cards Area 物料卡區域

下方區域顯示所有物料卡片的狀態:

Material Card Creation and Deletion 物料卡建立與刪除

Material Card Information 物料卡資訊

3. Parameter.json 參數系統

本應用程式的核心特色在於其事件驅動架構。透過 Parameter.json,您可以彈性定義:

3.1 System Events 系統事件

定義在 System.SystemState 區段,例如:

3.2 WorkCard Events 工作卡事件

定義在 WorkSpace.WorkCards 區段,每個 WorkCardID 可設定多種事件:

3.3 MaterialCard Events 物料卡事件

定義在 WorkSpace.MaterialCards 區段:

3.4 Property Update Mechanism 屬性更新機制

每個事件可定義多個 UpdateProperty 項目:

4. 應用場景

4.1 Development and Testing 開發與測試

4.2 System Integration 系統整合

4.3 Education and Training 教育訓練

5. 技術規格

6. 快速開始

  1. 啟動應用程式
  2. 切換至 Setting 頁面,設定連線參數並點擊 Open 建立連線
  3. 載入 SML 訊息庫檔案 (*.sml)
  4. 切換至 ManualOperation 頁面,雙擊訊息進行手動測試
  5. 切換至 WorkSpace 頁面,觀察自動化流程運作
  6. 使用 Slot Mapping Visual Window 與 Result Viewer 檢視處理結果

7. 注意事項

版本: v0.0.1.0
最後更新: 2025-11-06

EAP HOST EMULATOR User Guide

1. Application Overview

1.1 What is EAP HOST EMULATOR

EAP HOST EMULATOR is a SECS/GEM (Semiconductor Equipment Communications Standard / Generic Equipment Model) protocol simulator designed for the semiconductor manufacturing industry. This application simulates communication between Host equipment and semiconductor manufacturing equipment using the HSMS (High-Speed Message Service) protocol for connection and message exchange.

1.2 Key Features

This application provides the following core functionalities:

For detailed operation demonstrations, please refer to:

2. Page Feature Introduction

2.1 Setting Page

Setting Page

The Setting page provides core configuration functions for the application, including the following four sections:

2.1.1 Theme Setting

2.1.2 Connection Setting

This section is used to configure HSMS protocol connection parameters:

Protocol Selection

General Settings

Timeout Settings

Operation Buttons

After successful connection, the status indicator in the upper right corner of the application will change from red (Offline) to green (Online).

Demo:

2.1.3 Secs Message Library Loader

Demo:

2.1.4 Control State Setting

Demo:

2.2 ManualOperation Page

ManualOperation Page

The ManualOperation page is the center for editing and sending SECS messages, mainly including the following features:

2.2.1 Secs Message List

The left panel displays the loaded SECS message list:

Message Naming Format

Message Categories
The screenshot shows support for various SECS message types:

Operations

Demo:

2.2.2 Selected Node Details

The right panel displays the complete tree structure of the selected message, presenting all elements of the SECS message in a hierarchical manner.

2.2.3 SML Editor

This page integrates complete SECS message editing functionality:

Supported Data Types

Editing Functions

Editing Workflow

  1. Create a root node with naming format SxFy[W]:Description
  2. Add LIST or data type nodes under the root node
  3. Continue adding nested structures under LIST nodes
  4. Input values for each node
  5. Double-click to send or save as a file

Template Variable System

The SML Editor supports dynamic variable substitution and type casting for ASCII fields:

Variable Substitution Format: {{PropertyName}}

Supported Type Cast Names (case-insensitive):

Demo:

2.3 WorkSpace Page

WorkSpace Page

The WorkSpace page is the core management interface for semiconductor process flows, mainly including the following functional modules:

2.3.1 Information Card Area

The upper area displays multiple Information Cards (up to 4, corresponding to Ports 1-4), each card represents a work port:

Card Information Display

Card Function Buttons

Job Operation Area
Below each Information Card displays two main operation items:

2.3.2 Slot Mapping Visual Window

Slot Mapping Visual Window

Window Information

Slot Status Display

Slot Details
Click any slot to view detailed information on the right:

Application Scenarios

2.3.3 Verify Flow

The verification flow is a critical step in semiconductor processes, used to confirm the correctness of carrier and material information:

Main Verification Items

  1. Carrier ID Verify
    • Verify if carrier ID matches system records
    • Event ID: 262 (CarrierIDVerify)
  2. Slot Verify
    • Verify if slot configuration is correct
    • Check occupation status of each slot
    • Event ID: 301 (SlotVerify)

Verification Process

  1. Carrier arrives at port
  2. System reads Carrier ID
  3. Execute Carrier ID verification
  4. Read Slot Mapping
  5. Execute slot verification
  6. Update Information Card information after verification passes

Required SML Message Names
The system searches for specific message names in the loaded SML file. The message names must match these patterns (case-insensitive):

Demo:

2.3.4 Job Flow

Job Flow manages work scheduling and execution in semiconductor processes:

Process Job

Control Job

Required SML Message Names
The system searches for specific message names in the loaded SML file. The message names must match these patterns (case-insensitive):

Process Job Messages:

Control Job Messages:

Additional Messages:

Demo:

2.3.5 Auto Flow

Auto Flow integrates complete process steps including verification, job creation, and execution:

Automation Flow Steps

  1. Carrier arrival triggers Port State Change
  2. Automatically execute Carrier ID and Slot verification
  3. Automatically create Process Job and Control Job based on parameters
  4. Automatically start job execution
  5. Automatically unload and generate Process Result after completion

Flow Monitoring

Demo:

2.3.6 Result Viewer

After processing is complete, click ProcessResult to open the Process Result Detail window, which includes three tabs:

Comparison Tab

Comparison Tab

From the example screenshot:

Processed Tab

Processed Tab

Expected Tab

Expected Tab

Result Status Mapping

2.3.7 Material Cards Area

The lower area displays the status of all material cards:

Material Card Creation and Deletion

Material Card Information

3. Parameter.json Parameter System

The core feature of this application is its event-driven architecture. Through Parameter.json, you can flexibly define:

3.1 System Events

Defined in the System.SystemState section, for example:

3.2 WorkCard Events

Defined in the WorkSpace.WorkCards section, each WorkCardID can configure multiple events:

3.3 MaterialCard Events

Defined in the WorkSpace.MaterialCards section:

3.4 Property Update Mechanism

Each event can define multiple UpdateProperty entries:

4. Application Scenarios

4.1 Development and Testing

4.2 System Integration

4.3 Education and Training

5. Technical Specifications

6. Quick Start

  1. Launch the application
  2. Switch to the Setting page, configure connection parameters and click Open to establish connection
  3. Load SML message library file (*.sml)
  4. Switch to the ManualOperation page, double-click messages for manual testing
  5. Switch to the WorkSpace page, observe automated flow operations
  6. Use Slot Mapping Visual Window and Result Viewer to check processing results

7. Important Notes

Version: v0.0.1.0
Last Updated: 2025-11-06